{"417381":{"#nid":"417381","#data":{"type":"news","title":"SUSS MicroTec and Georgia Institute of Technology Establish Partnership for Bio-medical Devices and Semiconductor 3D Packaging Research","body":[{"value":"\u003Cp\u003E\u003Cem\u003E\u003Cstrong\u003E\u0026nbsp;\u0026nbsp;\u0026nbsp;\u0026nbsp;\u0026nbsp;\u003C\/strong\u003E\u003C\/em\u003E\u003Cstrong\u003E\u0026nbsp;\u0026nbsp;\u0026nbsp; Garching, Germany, May 26, 2015\u003C\/strong\u003E\u2013 SUSS MicroTec, a global supplier of equipment and process solutions for the semiconductor industry and related markets, and the Georgia Institute of Technology (Georgia Tech) announced today a collaboration for nanotechnology, bio-medical and semiconductor 3D packaging research.\u0026nbsp;\u003C\/p\u003E\u003Cp\u003EAs a part of a broadening alliance, a SUSS mask aligner will be added to a cluster of Suss equipment currently installed in the Institute for Electronics and Nanotechnology (IEN) cleanrooms at Georgia Tech, dedicated for bio-medical device research and fabrication.\u0026nbsp; In early 2015, SUSS also joined Georgia Tech\u2019s Packaging Research Center (PRC) where advanced exposure tools, including excimer laser ablation systems, are utilized for via drilling on non-photosensitive materials. \u0026nbsp;Initial results of the collaboration on via drilling will be jointly presented by Suss and PRC at IEEE Electronic Components and Technology Conference (ECTC) in San Diego on May 26~29, 2015. \u003C\/p\u003E\u003Cp\u003E\u201cGeorgia Tech\u2019s IEN maintains a leading research facility and is part of the NSF-funded National Nanotechnology Infrastructure Network (NINN) formed by 14 US universities\u201d, states Dr. Oliver Brand, Executive Director of IEN. \u201cThe addition of this new technology will provide needed functionality for our bio-medical and micro-fluidic research by enhancing our soft lithography capabilities with a wide number of related nanotechnology applications. \u0026nbsp;IEN is dedicated to providing access to this state-of-the-art facility and technology workshops to outside industrial users.\u0026nbsp; It is also Georgia Tech\u2019s vision to train a local workforce for the growing demand in the nanotechnology industry, particularly in the US Southeast region\u201d. \u003C\/p\u003E\u003Cp\u003E\u201cExcimer laser ablation provides a simple solution for imaging on non-photo-sensitive materials without the high cost of conventional photolithography where multiple coating, exposure, developing and etching processes are required\u201d, says Professor Rao Tummala, Director of Packaging Research Center at Georgia Tech. \u201cWe are fortunate to have access to advanced exposure tools like excimer laser ablation systems to demonstrate smaller features such as via drilling down to 1um \u201c. \u003C\/p\u003E\u003Cp\u003E\u201cMany engineers and researchers get to know SUSS MicroTec through their first experiences with our machines at undergraduate or graduate schools\u201d, says Ralph Zoberbier, General Manager Exposure and Laser Processing at SUSS MicroTec. \u0022We are excited to deepen our relationship with the Georgia Institute of Technology, which is a leading industrial research partner for the high potential growth markets of bio-medical and emerging advanced packaging applications, like 3D-IC, 2.5D interposer solutions and panel size packing\u201d.\u003C\/p\u003E","summary":null,"format":"limited_html"}],"field_subtitle":"","field_summary":"","field_summary_sentence":[{"value":"SUSS MicroTec and the Georgia Institute of Technology (Georgia Tech) announced today a collaboration for nanotechnology, bio-medical andsemiconductor 3D packaging research."}],"uid":"27863","created_gmt":"2015-06-23 11:57:18","changed_gmt":"2016-10-08 03:18:45","author":"Christa Ernst","boilerplate_text":"","field_publication":"","field_article_url":"","dateline":{"date":"2015-06-23T00:00:00-04:00","iso_date":"2015-06-23T00:00:00-04:00","tz":"America\/New_York"},"extras":[],"hg_media":{"417371":{"id":"417371","type":"image","title":"SUSS MA","body":null,"created":"1449254269","gmt_created":"2015-12-04 18:37:49","changed":"1475895155","gmt_changed":"2016-10-08 02:52:35","alt":"SUSS MA","file":{"fid":"202578","name":"suss_mask_aligner.png","image_path":"\/sites\/default\/files\/images\/suss_mask_aligner_0.png","image_full_path":"http:\/\/www.tlwarc.hg.gatech.edu\/\/sites\/default\/files\/images\/suss_mask_aligner_0.png","mime":"image\/png","size":112168,"path_740":"http:\/\/www.tlwarc.hg.gatech.edu\/sites\/default\/files\/styles\/740xx_scale\/public\/images\/suss_mask_aligner_0.png?itok=U9Vjqvxg"}}},"media_ids":["417371"],"groups":[{"id":"1271","name":"NanoTECH"}],"categories":[{"id":"129","name":"Institute and Campus"},{"id":"145","name":"Engineering"},{"id":"149","name":"Nanotechnology and Nanoscience"},{"id":"135","name":"Research"}],"keywords":[{"id":"12072","name":"3D Systems Packaging Research Center"},{"id":"129691","name":"advanced packaging research"},{"id":"129681","name":"biomedical research"},{"id":"14219","name":"Coulter Department of Biomedical Engineering"},{"id":"12701","name":"Institute for Electronics and Nanotechnology"},{"id":"166855","name":"School of Electrical and Computer Engineering"},{"id":"167927","name":"soft lithography"}],"core_research_areas":[{"id":"39441","name":"Bioengineering and Bioscience"},{"id":"39451","name":"Electronics and Nanotechnology"},{"id":"39471","name":"Materials"}],"news_room_topics":[],"event_categories":[],"invited_audience":[],"affiliations":[],"classification":[],"areas_of_expertise":[],"news_and_recent_appearances":[],"phone":[],"contact":[{"value":"Christa Ernst - IEN Communications \u0026amp; Development\u003Ca href=\u0022mailto:christa.ernst@ien.gatech.edu\u0022\u003Echrista.ernst@ien.gatech.edu\u003C\/a\u003E","format":"limited_html"}],"email":["christa.ernst@ien.gatech.edu"],"slides":[],"orientation":[],"userdata":""}}}