{"56238":{"#nid":"56238","#data":{"type":"event","title":"ChBE Fall Seminar Series  Tom Edgar","body":[{"value":"\u003Cp\u003E\u003Cstrong\u003ETom Edgar\u003C\/strong\u003E of the University of Texas presents \u003Cem\u003EA Batch Process Control Framework for Semiconductor Manufacturing\u003C\/em\u003E as part of ChBE\u0027s Fall 2006 Seminar Series.\n\u003C\/p\u003E\n\u003Cp\u003ERefreshments will be served from 3:30-4:00PM\u003Cbr \/\u003E\nThe seminar will be held 4:00-5:00PM\n\u003C\/p\u003E\n\u003Cp\u003E\u003Cstrong\u003EAbstract\u003C\/strong\u003E\u003Cbr \/\u003E\nAdvances in modeling and control will be required to meet future technical challenges in semiconductor manufacturing.  For batch processes such as occur in semiconductor fabrication, modeling and control must be incorporated into a multi-level framework including sequential control, within-the-batch control, run-to-run control, fault detection, and factory control.  Implementation challenges include a lack of suitable in situ measurements, variations in process equipment characteristics and wafer properties, limited process understanding, and non-automated operational practices.  This presentation reviews how basic research findings in modeling and control have influenced commercial applications in key unit operations such as lithography and plasma etching as well as in overall factory control.\n\u003C\/p\u003E","summary":null,"format":"limited_html"}],"field_subtitle":"","field_summary":[{"value":"\u003Cstrong\u003ETom Edgar\u003C\/strong\u003E of the University of Texas presents \u003Cem\u003EA Batch Process Control Framework for Semiconductor Manufacturing\u003C\/em\u003E as part of ChBE\u0027s Fall 2006 Seminar Series.","format":"limited_html"}],"field_summary_sentence":[{"value":"Tom Edgar of the Univ. of Texas presents lecture"}],"uid":"27255","created_gmt":"2010-05-20 11:47:29","changed_gmt":"2016-10-08 01:51:41","author":"Josie Giles","boilerplate_text":"","field_publication":"","field_article_url":"","field_event_time":{"event_time_start":"2006-10-11T16:30:00-04:00","event_time_end":"2006-10-11T18:00:00-04:00","event_time_end_last":"2006-10-11T18:00:00-04:00","gmt_time_start":"2006-10-11 20:30:00","gmt_time_end":"2006-10-11 22:00:00","gmt_time_end_last":"2006-10-11 22:00:00","rrule":null,"timezone":"America\/New_York"},"extras":[],"groups":[{"id":"1240","name":"School of Chemical and Biomolecular Engineering"}],"categories":[],"keywords":[{"id":"6640","name":"ChBE Seminar Series"},{"id":"6641","name":"Georgia Tech seminars"}],"core_research_areas":[],"news_room_topics":[],"event_categories":[{"id":"1795","name":"Seminar\/Lecture\/Colloquium"}],"invited_audience":[],"affiliations":[],"classification":[],"areas_of_expertise":[],"news_and_recent_appearances":[],"phone":[],"contact":[{"value":"\u003Cstrong\u003EJosie Giles\u003C\/strong\u003E\u003Cbr \/\u003ESchool of Chemical \u0026amp; Biomolecular Engineering\u003Cbr \/\u003E\u003Ca href=\u0022http:\/\/www.gatech.edu\/contact\/index.html?id=jg234\u0022\u003EContact Josie Giles\u003C\/a\u003E\u003Cbr \/\u003E\u003Cstrong\u003E404-385-2299\u003C\/strong\u003E","format":"limited_html"}],"email":[],"slides":[],"orientation":[],"userdata":""}}}