{"622644":{"#nid":"622644","#data":{"type":"event","title":"Magnetron Sputtering Systems for Thin Film Applications: Tools Optimized for Chalcogenide and Reactive Sputtering Applications","body":[{"value":"\u003Ch5\u003EMagnetron Sputtering Systems for Thin Film Applications: Tools Optimized for Chalcogenide and Reactive Sputtering Applications\u003C\/h5\u003E\r\n\r\n\u003Ch2\u003E\u003Cbr \/\u003E\r\nMike Hale, Sales Manager AJA International, Inc.\u003Cbr \/\u003E\r\nMonday, Jun. 24th @ 12:30PM | Pettit Microelectronics Building 102A\u003C\/h2\u003E\r\n\r\n\u003Cp\u003E\u0026nbsp;\u003C\/p\u003E\r\n\r\n\u003Cp\u003EMagnetron sputtering is a high-rate vacuum coating technique that allows the deposition of many types of materials, including metals and ceramics, onto as many types of substrate materials by the use of a specially formed magnetic field applied to a diode sputtering target. It allows a faster deposition rate at lower pressures compared with other techniques and is able to create strongly adhesive coatings on complex geometries including those made of heat-sensitive substrates such as polymers.*\u003C\/p\u003E\r\n\r\n\u003Cp\u003E\u003Cstrong\u003ESeminar attendees will be provided pizza and drinks during the talk.\u003C\/strong\u003E\u003C\/p\u003E\r\n","summary":null,"format":"limited_html"}],"field_subtitle":"","field_summary":"","field_summary_sentence":[{"value":"Magnetron sputtering is a high-rate vacuum coating technique that allows the deposition of many types of materials, including metals and ceramics, onto as many types of substrate materials"}],"uid":"27863","created_gmt":"2019-06-20 16:04:34","changed_gmt":"2019-06-20 16:05:23","author":"Christa Ernst","boilerplate_text":"","field_publication":"","field_article_url":"","field_event_time":{"event_time_start":"2019-06-24T13:30:00-04:00","event_time_end":"2019-06-24T14:30:00-04:00","event_time_end_last":"2019-06-24T14:30:00-04:00","gmt_time_start":"2019-06-24 17:30:00","gmt_time_end":"2019-06-24 18:30:00","gmt_time_end_last":"2019-06-24 18:30:00","rrule":null,"timezone":"America\/New_York"},"extras":["free_food"],"groups":[{"id":"213791","name":"3D Systems Packaging Research Center"},{"id":"198081","name":"Georgia Electronic Design Center (GEDC)"},{"id":"197261","name":"Institute for Electronics and Nanotechnology"},{"id":"1271","name":"NanoTECH"},{"id":"213771","name":"The Center for MEMS and Microsystems Technologies"}],"categories":[],"keywords":[{"id":"12701","name":"Institute for Electronics and Nanotechnology"},{"id":"173609","name":"cleanroom techniques"},{"id":"181552","name":"deposition techniques"},{"id":"12377","name":"Materials Engineering"},{"id":"107","name":"Nanotechnology"},{"id":"181553","name":"fabrication techniques"},{"id":"91891","name":"cleanroom training"},{"id":"2832","name":"microelectronics"},{"id":"7577","name":"nanostructure"},{"id":"112641","name":"nanopatterning"}],"core_research_areas":[],"news_room_topics":[],"event_categories":[{"id":"10377","name":"Career\/Professional development"},{"id":"1795","name":"Seminar\/Lecture\/Colloquium"}],"invited_audience":[{"id":"78761","name":"Faculty\/Staff"},{"id":"177814","name":"Postdoc"},{"id":"78771","name":"Public"},{"id":"174045","name":"Graduate students"},{"id":"78751","name":"Undergraduate students"}],"affiliations":[],"classification":[],"areas_of_expertise":[],"news_and_recent_appearances":[],"phone":[],"contact":[{"value":"\u003Cp\u003Ehang.chen@ien.gatech.edu\u003C\/p\u003E\r\n","format":"limited_html"}],"email":[],"slides":[],"orientation":[],"userdata":""}}}