{"660036":{"#nid":"660036","#data":{"type":"event","title":"Ph.D. Dissertation Defense - Mingyo Park","body":[{"value":"\u003Cp\u003E\u003Cstrong\u003ETitle\u003C\/strong\u003E\u003Cem\u003E:\u0026nbsp; \u003C\/em\u003E\u003Cem\u003EAcoustic Resonators based on Epitaxial AlN\/AlScN Ultra-thin Piezoelectric Films\u003C\/em\u003E\u003C\/p\u003E\r\n\r\n\u003Cp\u003E\u003Cstrong\u003ECommittee:\u003C\/strong\u003E\u003C\/p\u003E\r\n\r\n\u003Cp\u003EDr. Azadeh Ansari, ECE, Chair, Advisor\u003C\/p\u003E\r\n\r\n\u003Cp\u003EDr. John Cressler, ECE\u003C\/p\u003E\r\n\r\n\u003Cp\u003EDr. Farrokh Ayazi, ECE\u003C\/p\u003E\r\n\r\n\u003Cp\u003EDr. Oliver Brand, ECE\u003C\/p\u003E\r\n\r\n\u003Cp\u003EDr. Sukwon Choi, PSU\u003C\/p\u003E\r\n\r\n\u003Cp\u003E\u003Cstrong\u003EAbstract: \u003C\/strong\u003EThis work is focused on the design, fabrication, and characterization of MEMS acoustic resonators based on Epitaxial AlN\/AlScN thin piezoelectric films. This work demonstrates super high frequency(SHF) lamb, surface acoustic wave(SAW), and thin-film bulk acoustic wave resonators (FBAR) based on single-crystal orientation Alumium Scandium Nitride (AlScN) thin films grown on silicon substrates by molecular beam epitaxy (MBE). In order to target emerging wireless communication standards, such as 4G LTE\/5G, the effects of film thickness on FWHM and Sc concentration on piezocoefficient are studied based on the requirements of the resonators\/filters for operation at the SHF range. Furthermore, this work reports on the generation and frequency tuning of phononic(mechanical) frequency combs in an integrated standalone AlN-on-Si flexural resonator via non-degenerate parametric pumping. Cubic nonlinearity due to the geometrical Duffing effect is studied and induced various parametrically-excited regimes are presented along with stress-induced mode coupling in Aluminum Nitride (AlN) circular MEM resonators.\u003C\/p\u003E\r\n","summary":null,"format":"limited_html"}],"field_subtitle":"","field_summary":"","field_summary_sentence":[{"value":"Acoustic Resonators based on Epitaxial AlN\/AlScN Ultra-thin Piezoelectric Films "}],"uid":"28475","created_gmt":"2022-08-09 21:20:47","changed_gmt":"2022-08-09 21:20:47","author":"Daniela Staiculescu","boilerplate_text":"","field_publication":"","field_article_url":"","field_event_time":{"event_time_start":"2022-08-18T10:00:00-04:00","event_time_end":"2022-08-18T12:00:00-04:00","event_time_end_last":"2022-08-18T12:00:00-04:00","gmt_time_start":"2022-08-18 14:00:00","gmt_time_end":"2022-08-18 16:00:00","gmt_time_end_last":"2022-08-18 16:00:00","rrule":null,"timezone":"America\/New_York"},"extras":[],"groups":[{"id":"434381","name":"ECE Ph.D. Dissertation Defenses"}],"categories":[],"keywords":[{"id":"100811","name":"Phd Defense"},{"id":"1808","name":"graduate students"}],"core_research_areas":[],"news_room_topics":[],"event_categories":[{"id":"1788","name":"Other\/Miscellaneous"}],"invited_audience":[{"id":"78771","name":"Public"}],"affiliations":[],"classification":[],"areas_of_expertise":[],"news_and_recent_appearances":[],"phone":[],"contact":[],"email":[],"slides":[],"orientation":[],"userdata":""}}}